@article{844626,
  author = {J Tucker and M Rao and O Holland and P Chi and N Papanicolaou and J Freitas},
  title = {Arsenic and Antimony Implantations in SiC},
  year = {2021},
  month = {2021-10-12 15:10:18},
  publisher = {Journal of Applied Physics},
  language = {en},
}