@article{845046,
  author = {K Kim and D Moon and P Chi and David Simons},
  title = {Development of B-Doped Si Multiple Δ-Layer Reference Materials for SIMS Profiling},
  year = {2005},
  number = {37},
  month = {2005-10-01 00:10:00},
  publisher = {Surface and Interface Analysis},
  language = {en},
}