@conference{845926,
  author = {B Tsai and J Lovas f and D DeWitt and Kenneth Kreider and Burns Burns g},
  title = {In Chamber Thermometry Calibration Using A Si Proof Wafer},
  year = {1997},
  number = {5},
  month = {1997-09-03 00:09:00},
  publisher = {5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA, USA},
  language = {en},
}