@article{845941,
  author = {N. Tea and V. Milanovic and C. Zincke and John Suehle and Michael Gaitan and Mona Zaghloul},
  title = {Hybrid Postprocessing Etching for CMOS-Compatible MEMS},
  year = {1997},
  number = {6},
  month = {1997-12-01 00:12:00},
  publisher = {Journal of Microelectromechanical Systems},
  language = {en},
}