@article{845976, author = {D. Khera and Michael Cresswell and Loren Linholm and G. Ramanathan and J. Buzzeo and A. Nagarajan}, title = {Increasing Profitability and Improving Semiconductor Manufacturing Throughput Using Expert Systems}, year = {1994}, number = {41}, month = {1994-05-01 00:05:00}, publisher = {IEEE Transactions on Engineering Management}, language = {en}, }