@conference{846641, author = {V. Milanovic and Michael Gaitan and E. Bowen and N. Tea and Mona Zaghloul}, title = {Design and Fabrication of Micromachined Passive Microwave Filtering Elements in CMOS Technology}, year = {1997}, number = {2}, month = {1997-12-31 00:12:00}, publisher = {Proc., 1997 International Conference on Solid-State Sensors and Actuators - Transducers'97, Chicago, IL, USA}, language = {en}, }