@conference{846841,
  author = {S. Smee and Michael Gaitan and Yogendra Joshi and David Blackburn},
  title = {MEMS-Based Test Structures for IC Technology},
  year = {1998},
  month = {1998-12-31 00:12:00},
  publisher = {Proc.,  ASME, Anaheim, CA, USA},
  language = {en},
}