@article{847276, author = {S. Smee and Michael Gaitan and Donald Novotny and Yogendra Joshi and David Blackburn}, title = {IC Test Structures for Multi-Layer Interconnect Stress Determination}, year = {2000}, number = {21}, month = {2000-01-01 00:01:00}, publisher = {IEEE Electron Device Letters}, language = {en}, }