@conference{847341,
  author = {John Suehle and Eric Vogel and Bin Wang and J Bernstein},
  title = {Temperature Dependence of Soft Breakdown and Wear-Out in Sub-3 nm SiO<sub>2</sub> Films},
  year = {2000},
  month = {2000-12-31 00:12:00},
  publisher = {Proc. 2000 International Reliability Physics Symposium, San Jose, CA, USA},
  language = {en},
}