@article{847351,
  author = {Y Lin and R Puthenkovilakam and J Chang and Charles Bouldin and Igor Levin and Nhan Nguyen and James Ehrstein and Ying Sun and P Pianetta and T Conard and Wilfried Vandervorst and V Venturo and S Selbrede},
  title = {Interfacial Properties of ZrO<sub>2</sub> on Silicon},
  year = {2003},
  number = {93},
  month = {2003-05-15 00:05:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}