@conference{871451,
  author = {Michael Postek and Andras Vladar and John Villarrubia},
  title = {Nanoelectronics Dimensional Metrology: Understanding the Differences between Secondary and Backscattered Electron Imaging},
  year = {2017},
  month = {2017-03-20 04:03:00},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923292},
  language = {en},
}