@article{902176, author = {Andrew Herzing and Justin Brons and Karen Henry and Ian Anderson and Gregory Thompson}, title = {Comparison of atom probe compositional fidelity across thin film interfaces}, year = {2014}, month = {2014-01-01 05:01:00}, publisher = {Thin Solid Films}, doi = {https://doi.org/10.1016/j.tsf.2013.11.105}, language = {en}, }