@article{913206,
  author = {Robert Cook and Brad Boyce and Lawrence Henry Friedman and Frank DelRio},
  title = {High-throughput bend-strengths of ultra-small polysilicon MEMS components},
  year = {2021},
  number = {118},
  month = {2021-05-17 04:05:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=931889},
  doi = {https://doi.org/10.1063/5.0049521},
  language = {en},
}