@conference{918846,
  author = {Ndubuisi George Orji},
  title = {Spectral Analysis of Line Edge and Line Width Roughness using Wavelets},
  year = {2021},
  number = {11611},
  month = {2021-04-01 04:04:00},
  publisher = {Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (Conference 11611), Virtual, MD, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932010},
  doi = {https://doi.org/10.1117/12.2584649},
  language = {en},
}