@article{925616,
  author = {Daniel Josell and William Alexander Osborn and Maureen E. Williams},
  title = {Robust Bottom-Up Gold Filling of Deep Trenches and Gratings},
  year = {2022},
  number = {169},
  month = {2022-03-25 04:03:00},
  publisher = {Journal of the Electrochemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934067},
  doi = {https://doi.org/10.1149/1945-7111/ ac5c0b},
  language = {en},
}