TY - JOUR AU - McGray, Craig AU - Stavis, Samuel AU - Giltinan, Joshua AU - Eastman, Eric AU - Firebaugh, Samara AU - Jenelle, AU - Geist, Jon AU - Gaitan, Michael C2 - IEEE Journal of Microelectromechanical Systems DA - 2012-09-27 DO - https://doi.org/10.1109/JMEMS.2012.2216506 LA - en PB - IEEE Journal of Microelectromechanical Systems PY - 2012 TI - MEMS Kinematics by Super-Resolution Fluorescence Microscopy ER -