TY - CONF AU - Kramar, John AU - Villarrubia, C AU - Teague, E AU - Scire, W AU - Penzes, William C2 - Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference, Denver, CO DA - 1999-11-01 LA - en M1 - 3806 PB - Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference, Denver, CO PY - 1999 TI - Grating Pitch Measurements with the Molecular Measuring Machine ER -