TY  - CONF
AU  - Mark, 
AU  - Silver, Richard
AU  - Zhang, Nien
AU  - Zhou, Hui
AU  - Barnes, Bryan
C2  - SPIE Modeling Aspects in Optical Metrology V, Munich, -1
DA  - 2015-06-21
DO  - https://doi.org/10.1117/12.2189928
LA  - en
M1  - 9526
PB  - SPIE Modeling Aspects in Optical Metrology V, Munich, -1
PY  - 2015
TI  - The effect of systematic errors on the hybridization of optical critical dimension measurements
ER  -