TY  - JOUR
AU  - Gillen, John
AU  - Phelps, J
AU  - Nelson, Randall
AU  - Williams, Peter
AU  - Hues, Steven
C2  - Surface and Interface Analysis
DA  - 1989-04-01
LA  - en
M1  - 14
PB  - Surface and Interface Analysis
PY  - 1989
TI  - Secondary Ion Yield Matrix Effects in SIMS Depth Profiles of Si/Ge Multilayers
ER  -