TY  - JOUR
AU  - Sperling, Brent
AU  - Hoang, John
AU  - Kimes, William
AU  - Maslar, James
C2  - Applied Spectroscopy
DA  - 2013-09-10
DO  - https://doi.org/10.1366/13-06995
LA  - en
M1  - 67
PB  - Applied Spectroscopy
PY  - 2013
TI  - Time-resolved surface infrared spectroscopy during atomic layer deposition
ER  -