TY  - JOUR
AU  - Sperling, Brent
AU  - Hoang, John
AU  - Kimes, William
AU  - Maslar, James
AU  - Kristen, 
AU  - Nguyen, Nhan
C2  - Journal of Vacuum Science and Technology A
DA  - 2014-04-23
DO  - https://doi.org/10.1116/1.4872166
LA  - en
M1  - 32
PB  - Journal of Vacuum Science and Technology A
PY  - 2014
TI  - Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO2 using tetrakis(dimethylamido)titanium and water
ER  -