TY  - CONF
AU  - Song, Jun-Feng
AU  - Rudder, F
AU  - Vorburger, Theodore
AU  - Hartman, A
AU  - Scace, Brian
AU  - Smith, J
C2  - Proceedings of the 6th International Conference on Metrology and Properties of Engineering Surfaces, Birmingham, -1
DA  - 1994-01-01
LA  - en
PB  - Proceedings of the 6th International Conference on Metrology and Properties of Engineering Surfaces, Birmingham, -1
PY  - 1994
TI  - Microform Calibrations in Surface Metrology
ER  -