TY  - JOUR
AU  - Song, Jun-Feng
AU  - Rubert, P
AU  - Zheng, Xiaoyu
AU  - Vorburger, Theodore
C2  - Measurement Science & Technology
DA  - 2008-07-04
LA  - en
M1  - 19
PB  - Measurement Science & Technology
PY  - 2008
TI  - Topography Measurements for Determining the Decay Factors in Surface Replication
ER  -