TY  - CHAP
AU  - Orji, Ndubuisi
AU  - Sanchez, M.
AU  - Raja, Jayaraman
AU  - Vorburger, Theodore
C2  - Applied Scanning Probe Methods I (NanoScience and Technology), Springer-Verlag, Berlin Heidelberg, -1
DA  - 2004-03-05
LA  - en
PB  - Applied Scanning Probe Methods I (NanoScience and Technology), Springer-Verlag, Berlin Heidelberg, -1
PY  - 2004
TI  - AFM Characterization of Semiconductor Line Edge Roughness, Edited by B. Bhushan, H. Fuchs, and S. Hosaka
ER  -