TY - CHAP AU - Vorburger, Theodore AU - Dagata, John AU - Wilkening, G. AU - Iizuka, K C2 - Methods of Surface Characterization, Volume 5, Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis, edited by A. W. Czanderna, T. E. Madey, C. J. Powell, Plenum Press, New York, NY DA - 1998-01-01 LA - en M1 - 5 PB - Methods of Surface Characterization, Volume 5, Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis, edited by A. W. Czanderna, T. E. Madey, C. J. Powell, Plenum Press, New York, NY PY - 1998 TI - Characterization of Surface Topography ER -