TY  - CONF
AU  - Vorburger, Theodore
AU  - Evans, Christopher
AU  - Tsai, V
AU  - Fu, Joseph
AU  - E., 
AU  - Dixson, Ronald
AU  - Sullivan, P
AU  - McWaid, T.
C2  - Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors, Tokyo, -1
DA  - 1997-01-01
LA  - en
PB  - Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors, Tokyo, -1
PY  - 1997
TI  - Finish and Figure Metrology for Soft X­ray Optics
ER  -