TY  - CONF
AU  - Vorburger, Theodore
AU  - McWade, T.
AU  - Fu, Joseph
AU  - Evans, Christopher
AU  - Estler, William
AU  - Parks, R
C2  - Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993, Unknown, -1
DA  - 1993-01-01
LA  - en
PB  - Proceedings of 3rd Soft X-ray Projection Lithography, Optical Society of America, Washington, DC, 1993, Unknown, -1
PY  - 1993
TI  - Surface Metrology of Soft X-ray Optics
ER  -