TY - JOUR AU - Watts, R AU - Tarrio, Charles AU - Lucatorto, Thomas AU - Madden, R AU - Deslattes, R AU - Caticha, Ariel AU - Estler, William AU - Evans, Christopher AU - McWade, T. AU - Fu, Joseph AU - Vorburger, Theodore C2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms DA - 1993-01-01 LA - en M1 - B79 PB - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms PY - 1993 TI - XUV Optics Characterization at the National Institute of Standards and Technology ER -