TY  - CONF
AU  - Sunday, Daniel
AU  - Wu, Wen-Li
AU  - Kline, Regis
C2  - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
DA  - 2013-08-12
DO  - https://doi.org/10.1117/1.JMM.12.3.031103
LA  - en
M1  - 12
PB  - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
PY  - 2013
TI  - Soft X-ray Characterization of DSA Block Copolymers
ER  -