TY  - JOUR
AU  - Davies, Angela
AU  - Schmitz, Tony
AU  - Parks, R
AU  - Evans, Christopher
C2  - Optical Engineering
DA  - 2003-08-01
LA  - en
M1  - 42 (8)
PB  - Optical Engineering
PY  - 2003
TI  - Silicon Wafer Thickness Variation Measurements Using the NIST Infrared Interferometer
ER  -