TY  - CONF
AU  - Marinenko, Ryna
AU  - Armstrong, J
AU  - Turner, Shirley
AU  - Steel, Eric
AU  - Stevie, F
C2  - Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX
PY  - 2003
TI  - Characterization of SiGe Bulk Compositional Standards with Electron Probe Microanalysis
ER  -