TY  - CONF
AU  - Marinenko, Ryna
AU  - Armstrong, J
AU  - Kaiser, Debra
AU  - Ritter, Joseph
AU  - Schenck, Peter
AU  - Bouldin, C
AU  - Blendell, J
AU  - Levin, Igor
C2  - Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP, Gaithersburg, MD
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP, Gaithersburg, MD
PY  - 2001
TI  - Fabrication and Electron Microprobe Characterization of Barium-Strontium-Titanate (BST) Films
ER  -