TY  - VIDEO
AU  - Vladar, Andras
AU  - Silver, Richard
AU  - Potzick, James
AU  - Villarrubia, John
C2  - ISMT Final Report
DA  - 2004-01-01
LA  - en
PB  - ISMT Final Report
PY  - 2004
TI  - Development of Photomask Artifacts and Metrology for the 65 nm Device Generation with Extensibility Beyond
ER  -