TY  - JOUR
AU  - Jach, Terrence
AU  - Landree, E
C2  - Surface and Interface Analysis
DA  - 2002-11-01
LA  - en
PB  - Surface and Interface Analysis
PY  - 2002
TI  - Grazing Incidence X-Ray Photoelectron Spectroscopy: A Method to Study Gate Dielectric Films on Si
ER  -