TY  - JOUR
AU  - Jach, Terrence
AU  - Landree, E
C2  - Surface and Interface Analysis
DA  - 2001-08-01
LA  - en
M1  - 31
PB  - Surface and Interface Analysis
PY  - 2001
TI  - Grazing Incidence X-Ray Photoemission Spectroscopy and the Accuracy of Thickness Measurements of CMOS Gate Dielectrics
ER  -