TY  - CONF
AU  - Scheuerman, Vincent
AU  - Kreider, K
AU  - Meyer, C
AU  - Dewitt, D
C2  - International Symposium on Advanced Thermal Processing of Semiconductors, San Francisco, CA
DA  - 2000-01-01
LA  - en
PB  - International Symposium on Advanced Thermal Processing of Semiconductors, San Francisco, CA
PY  - 2000
TI  - Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 Degrees Celsius
ER  -