TY - JOUR AU - Stafford, Christopher AU - Guo, Shu AU - Chiang, Martin AU - Harrison, C C2 - Review of Science Instruments DA - 2005-06-01 LA - en M1 - 76 No 6 PB - Review of Science Instruments PY - 2005 TI - Combinatorial and High-Throughput Measurement of the Modulus of Thin Polymer Films UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852438 ER -