TY  - CONF
AU  - Gillen, John
AU  - Roberson, S
AU  - Fahey, Albert
AU  - Walker, Marlon
AU  - Bennett, J
AU  - Lareau, R
C2  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP, backfill, -1
DA  - 2001-01-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP, backfill, -1
PY  - 2001
TI  - Cluster Primary Ion Beam Secondary Ion Mass Spectrometry for Semiconductor Characterization
ER  -