TY  - JOUR
AU  - Gillen, John
AU  - King, R
AU  - Freibaum, B
AU  - Lareau, R
AU  - Bennett, J
AU  - Chmara, F
C2  - Journal of Vacuum Science and Technology A
DA  - 2001-04-01
LA  - en
M1  - 19
PB  - Journal of Vacuum Science and Technology A
PY  - 2001
TI  - Negative Cesium Sputter Ion Source for Generating Cluster Primary Ion Beams for Secondary Ion Mass Spectrometry Analysis
ER  -