TY  - JOUR
AU  - Sobolewski, Mark
AU  - Langan, J
AU  - Felker, B
C2  - Journal of Vacuum Science and Technology B
DA  - 1998-02-11
LA  - en
M1  - 16 No. 1
PB  - Journal of Vacuum Science and Technology B
PY  - 1998
TI  - Electrical Optimization of PECVD Chamber Cleaning Plasmas
ER  -