TY  - CONF
AU  - Davis, R
AU  - Moore, Elizabeth
AU  - Burgess, Donald
AU  - Zachariah, Michael
C2  - International Conference on Characterization and Metrology for ULSI Technology
DA  - 1998-02-11
LA  - en
PB  - International Conference on Characterization and Metrology for ULSI Technology
PY  - 1998
TI  - A Microcontamination Model for Rotating Disk Chemical Vapor Deposition Reactors
ER  -