TY  - JOUR
AU  - Chi, P
AU  - Simons, David
AU  - Wickenden, A
AU  - Koleske, D
C2  - Journal of Vacuum Science and Technology A
DA  - 1997-02-10
LA  - en
M1  - 15
PB  - Journal of Vacuum Science and Technology A
PY  - 1997
TI  - Repeatability of Si Concentration Measurements in Si-Doped GaN Films
ER  -