TY  - CONF
AU  - Kramar, John
AU  - Jun, Jay
AU  - Penzes, William
AU  - Scheuerman, Vincent
AU  - Scire, Fredric
AU  - Teague, E
C2  - Proceedings of the American Society for Precision Engineering, Arlington, VA
DA  - 2001-01-01
LA  - en
M1  - 25
PB  - Proceedings of the American Society for Precision Engineering, Arlington, VA
PY  - 2001
TI  - Molecular Measuring Machine Design and Performance
ER  -