TY - JOUR AU - Vogel, Eric AU - Edelstein, Monica AU - Suehle, John C2 - Microelectronic Engineering DA - 2001-11-01 LA - en PB - Microelectronic Engineering PY - 2001 TI - Reliability of Ultra-Thin Silicon Dioxide Under Substrate Hot-Electronic, Substrate Hot-Hole, and Tunneling Stress ER -