TY  - CONF
AU  - Barnes, Bryan
AU  - Howard, L
AU  - Silver, Richard
C2  - Proceedings of SPIE, San Diego, CA
DA  - 2006-09-01
LA  - en
M1  - 6289
PB  - Proceedings of SPIE, San Diego, CA
PY  - 2006
TI  - Illumination Optimization for Optical Semiconductor Metrology
ER  -