TY  - GEN
AU  - Bertness, K.A.
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2017-09-01 04:09:00
DO  - https://doi.org/10.6028/NIST.SP.250-96
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2017
TI  - Dimensional measurement of nanostructures with scanning electron microscopy:
ER  -