TY  - GEN
AU  - Marshall, Janet C
AU  - Scace, Robert I
AU  - Baylies, Winthrop A
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2006-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.7291
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2006
TI  - MEMS length and strain round robin results with uncertainty analysis:
ER  -