TY  - GEN
AU  - Vorburger, T V
AU  - Allen, R H
AU  - Damazo, B
AU  - Fu, J
AU  - Monk, D
AU  - Osti, M
AU  - Pellegrino, J
AU  - Rhorer, R
AU  - Russell, R
AU  - Silver, R
AU  - Sriram, R
AU  - Stouffer, K
AU  - Swyt, D A
AU  - Teague, E C
AU  - Wheatley, T
AU  - Wilmering, D
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2002-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.6850
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2002
TI  - Nanomanufacturing of atom-based dimensional standards ::a final project report of the national advanced manufacturing testbed
ER  -