TY  - GEN
AU  - Marshall, J C
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2001-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.6779
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2001
TI  - MEMS length and strain measurements using an optical interferometer:
ER  -