TY - GEN AU - Obrzut, Jan AU - Chiang, C K AU - Popielarz, R AU - Nozaki, R C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 2000-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.6537 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 2000 TI - Evaluation of dielectric properties of polymer thin-film materials for application in embedded capacitance: ER -